Your Address : Globalchemmade--Beijing Yuji Science & Technology Co., Ltd.
Name:Beijing Yuji Science & Technology Co., Ltd.
Type:Others
Tel:86-21-62456266
Fax:86-21-62456266
Email:chem@yujigroup.com
Address:China(Mainland)
Products detail
| Product Name: | Hexafluoro-1, 3-Butadiene C4f6 Hexafluorobutadiene etching gas |
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| CAS No: | 685-63-2 | |
| Product Type: | Organic Chemicals and Derivatives -> Organic halogen compounds | |
| Product spec: | 99% | |
| Packing: | 4.64L/10.2L/44L Cylinder | |
| Post Time: | 2009-11-03 | |
| Usage: | Semiconductor Etching Gas | |
| Description: | Hexafluoro-1,3-butadiene/C4F6 Hexafluoro-1,3-butadiene (C4F6) is an environmentally friendly dry etching gas with low GWP, high etching rate, high ivity and high aspect ratio, showing very high performance for critical plasma etching in semiconductor devices manufacturing. Product Deion Items Specification Chemical Name Hexafluoro-1,3-butadiene, Perfluorobutadiene Chemical formula CF2=CF-CF=CF2 Molecular formula C4F6 CAS NO. 685-63-2 Molecular weight (g/mol) 162.03 ODP 0 GWP100 yr 260 Atmospheric lifetime (days) <1 Physical & Chemical Properties Attributes Values Chemical Name Hexafluoro-1,3-butadiene, Perfluorobutadiene Boiling point (ºC) -6.5 Freezing point (ºC) -130 Critical temperature (ºC) 139.6 Critical pressure (bar) 31.9 Liquid density (kg/l, @15ºC) 1.44 Vapor density (kg/m3, @15ºC) 6.8 Vapor pressure (bar, @25ºC) 2.11 Heat of vaporization (kJ/kg,@b.p.) 161.8 Explosion limits (%vol) 7-73 Packaging Information: 4.64L/10.2L/44L Cylinder | |