Your Address : Globalchemmade--Beijing Yuji Science & Technology Co., Ltd.
Name:Beijing Yuji Science & Technology Co., Ltd.
Type:Others
Tel:86-21-62456266
Fax:86-21-62456266
Email:chem@yujigroup.com
Address:China(Mainland)
Products detail
| Product Name: | HFC-41, R41, Methyl Fluoride, Fluoromethane etching gas |
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| CAS No: | 593-53-3 | |
| Product Type: | Organic Chemicals and Derivatives -> Organic halogen compounds | |
| Product spec: | >99% | |
| Packing: | 4.64L/10.2L/44L Cylinder | |
| Post Time: | 2009-11-03 | |
| Usage: | Semiconductor etching gas | |
| Description: | Methyl Fluoride /HFC-41 Methyl Fluoride (CH3F) is an environmentally friendly dry etching gas with low GWP, showing very high performance in etching process of semiconductor and electronic products. Chemical Name: Methyl Fluoride, Freon 41, HFC-41, R-41 Boiling point (℃): -78.4 Freezing point (℃): -142 Critical temperature (℃): 44.5 Relative gas density (air = 1): 1.2 Relative liquid density (water = 1): 0.61 Vapor pressure (kPa, @21℃): 3300 Explosion limits (%vol): 2.6-21.7 Packaging Information: 4.64L/10.2L/44L Cylinder | |